Machines for manufacturing semi-conductor substrates and thin-film deposits using vacuum techniques; machines and machine tools for vacuum treatment, vacuum coating installations or etching installations; machines for physical and chemical cleaning, structuring or removing of layers and mechanical processing of substrates, instruments or other parts to be coated in a vacuum installation; installations for vacuum treatment by plasma-assisted deposition, plasma treatment and plasma etching of parts.

Electronic devices and instruments for regulation, controlling and monitoring of surfaces and surface treatments; Optical, electric, magnetic, spectroscopic sensors and devices for measuring layer removal in thin-film processing installations.