Machines and machine tools; coating machines for tools and components; coating machines for optical and magnetic data storage media; surface treatment machines for coating and etching of components and monitors; vacuum coating components and spare parts (included in this class), namely vacuum ducts, vacuum valves, vacuum reversing devices, control units, substrate carriers; vacuum pumps; rotary vacuum pumps, propellant pumps; condensation vacuum pumps; sorption pumps; parts of vacuum chambers, namely, vacuum blocking slides, vacuum valves, vacuum connections and vacuum chambers components; separators; filters for vacuum pumps; vacuum sealing machines; machines for low-temperature engineering; surface treatment machines for operation under coarse vacuum, fine vacuum, high vacuum and ultra-high vacuum; vacuum machines for degassing, filling, impregnating, mixing, melting, atomizing, vaporizing, evaporation coating or coating of materials; vacuum heat treating machines for metals; vacuum coating machines for optical and magnetic data storage media; electric energy supply generators for space equipment, space probes, space stations, space laboratories and satellites, substantially consisting of mercury vapor turbines heated by bundled sunrays, automatic assembly machines for the semiconductor industry; production machines for the manufacture of flat screens; ultrasonic cleaning machines for substrates which are to be coated in a vacuum apparatus; engines for space vehicles, in particular recoil engines, ramjet engines, solid-propellant and liquid-propellant rocket engines, gas turbine engines, Machines and machine tools; coating machines for tools and components; coating machines for optical and magnetic data storage media; surface treatment machines for coating etching of components and monitors; vacuum coating components and spare parts included in this class, namely vacuum ducts, vacuum valves, vacuum reversing devices, control units, substrate carriers; vacuum pumpss; rotary vacuum pumps, propellant pumps; condensation vacuum pumps; sorption pumps; parts of vacuum chambers, namely vacuum blocking slides, vacuum valves, vacuum connections and vacuum chambers components; separators; filters for vacuum pumps; vacuum sealing machines for greases, cements and lacquers, machines for low-temperature engineering; surface treatment machines for operation under coarse vacuum, fine vacuum, high vacuum and ultra-high vacuum; vacuum machines for degassing, filling, impregnating, mixing, melting, atomizing, vaporizing, evaporation coating or coating of materials; vacuum heat treating machines for metals; vacuum coating machines for optical magnetic data storage media; electric energy supply generators for space equipment, space probes, space stations, space laboratories and satellites, substantially consisting of mercury vapor turbines heated by bundled sunrays, automatic assembly machines for the semiconductor industry; production machines for the manufacture of flat screens; ultrasonic cleaning machines for substrates which are to be coated in a vacuum apparatus; engines for space vehicles, in particular recoil engines, ramjet engines, solid-propellant and liquid- propellant, rocket engines, gas turbine engines, also Ion drive engines (for spacecrafts); parts of engines, lacquers vacuum coating equipment, namely sputtering cathodes, sputtering targets, sputtering sp uttering shields, sputtering masks, evaporation coating filaments, vacuum machines for drying, freeze-drying

Optical apparatus and instruments; optical components and systems for data and video projection, lighting industry, sensor systems, instrument construction and biotechnology; optical apparatus and its components with surface coatings; components and spare parts for vacuum coating apparatus, namely electronic control and regulation units; total pressure sensors, measuring devices and control devices, namely for the measurement of the total pressure in vacuum apparatus, partial pressure gages for vacuum apparatus; gas analysis devices, in particular for the determination of the gas composition at low and high pressures; electronic leak location devices for the finding of leaks in vacuum-tight containers and in air-tight containers, electronic chip carrier cleaners for the surface cleaning of electronic components; devices for the reception, transmission, transfer, receiving, reproduction and processing of sounds, signals and/or images; communication satellites, transmitters, devices of wired and of wireless information retrieval engineering, of information transfer engineering and of information processing engineering, including ultra-high frequency engineering and acoustics, radio direction apparatus, radar and radio locating devices, radar probes and navigation devices, laser devices for the retrieval, transfer and processing of information, sonar devices, night-vision devices, ultrasonic devices, photoelectrical measuring, control and regulating devices, remote steering devices for the generation and wireless or wired transmission of control and steering signals to unmanned and manned land, air and water vehicles as well as to unmanned missiles and space equipment as well as apparatus composed of these devices; controlling devices for space electronics; semiconductors; integrated circuits; electrotechnical vibration meter components (included in this class); measuring, regulating, controlling and monitoring devices for vacuum pumps; sealing heater test apparatus; vvacuum measuring devices; partial pressure gages; layer thickness gages and regulating devices; gas analysis devices; machine-like leak location devices; solar-electrical, photoelectrical and thermo-electrical energy converters as well as solar-thermal and photothermal energy converters, solar cells, devices for the absorption of the emission spectrum of the sun and for the reproduction of an emission spectrum comparable to that of the sun; satellites and parts of satellites

Space vehicles, namely, unmanned aircraft, in particular remote-controlled aircraft with or without recoil drive; spacecrafts, in particular, space probes, controllable space rockets, parts of space vehicles (not included in other classes)

Treatment of materials

Scientific and industrial services as well as related research and development services; industrial analysis and research; design and development of computers and computer programs