Machines and machine tools; apparatus for the coating of tools and components; coating apparatus for optical and magnetic data storage media; apparatus for the coating and etching of components and monitors; components and spare parts, namely vacuum ducts, vacuum valves, vacuum reversing devices, control units, substrate carriers; vacuum pumps; rotary vacuum pumps, propellant pumps; condensation vacuum pumps; sorption pumps; measuring, regulating, controlling and monitoring devices for vacuum pumps; vacuum blocking slides, vacuum valves, vacuum connections and vacuum components; separators; filters, liquid operating materials and lubricant for vacuum pumps; machine-like devices for low-temperature engineering; machine-like leak location devices; vacuum apparatus for operation under coarse vacuum, fine vacuum, high vacuum and ultra-high vacuum; machines for drying, freeze-drying, degassing, filling, impregnating, mixing, melting, atomizing, vaporizing, evaporation coating or coating of materials under vacuum; apparatus for the treatment of metals in vacuum; coating apparatus for optical and magnetic data storage media; automatic assembly machines for the semiconductor industry; production apparatus for the manufacture of flat screens

Optical apparatus and instruments; optical components and systems for data and video projection, lighting industry, sensor systems, instrument construction and biotechnology; optical and electronic components with surface coatings; components and spare parts for vacuum coating apparatus, namely electronic control and regulation units; total pressure sensors, measuring devices and control devices, namely for the measurement of the total pressure in vacuum apparatus, partial pressure gages for vacuum apparatus; gas analysis devices, in particular for the determination of the gas composition at low and high pressures; electronic leak location devices for the finding of leaks in vacuum-tight containers and in air-tight containers, electronic chip carrier cleaners for the surface cleaning of electronic components; ultrasonic cleaning apparatus for substrates which are to be coated in a vacuum apparatus; sputtering cathodes, sputtering targets, sputtering shields, sputtering masks, evaporation coating filaments, ceramic bricks, quartz crystals (where included in this class); devices for the reception, transmission, transfer, receiving, reproduction and processing of sounds, signals and/or images; communication satellites, transmitters, devices of wired and of wireless information retrieval engineering, of information transfer engineering and of information processing engineering, including ultra-high frequency engineering and acoustics, radio direction apparatus, radar and radio locating devices, radar probes and navigation devices, laser devices for the retrieval, transfer and processing of information, sonar devices, night-vision devices, ultrasonic devices, photoelectrical measuring, control and regulating devices, remote steering devices for the generation and wireless or wired transmission of control and steering signals to unmanned and manned land, air and water vehicles as well as to unmanned missiles and space equipment as well as apparatus composed of these devicces; devices for space electronics; semiconductors; integrated circuits; electrotechnical components (where contained in this class); sealing heater test apparatus; vacuum measuring devices; partial pressure gauges; layer thickness gauges and regulating devices; gas analysis devices; energy supply apparatus for space equipment, space probes, space stations, space laboratories and satellites, substantially consisting of solar-electrical, photoelectrical and thermo-electrical energy converters as well as solar-thermal and photothermal energy converters, mercury vapor turbines heated by bundled sunrays, solar cells, devices for the absorption of the emission spectrum of the sun and for the reproduction of an emission spectrum comparable to that of the sun